Bui, S.
and Vorburger, T.
(2007),
Surface Metrology Algorithm Testing System, Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
(Accessed May 14, 2025)
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Surface Metrology Algorithm Testing System
Published
Author(s)
,
Abstract
This paper presents the development of a Web-based surface metrology algorithm testing system. The system includes surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a web site at the National Institute of Standards and Technology (NIST), USA. Manufacturers, instrument makers, and researchers have Internet access to standard data sets and analysis tools located on a NIST server. The system serves to validate the accuracy of algorithms as well as the calculation of surface parameters in industry. The System can be accessed through http://ats.nist.gov/VSC/jsp.Citation
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Volume
31
Pub Type
Journals
Keywords
database, filtering, internet, parameters, software, surface, textures, topography, Web site
Citation
Issues
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Created January 1, 2007, Updated February 19, 2017