Kopanski, J.
(2002),
Capacitive Probe Microscopy, Encyclopedia of Imaging Science and Technology
(Accessed May 15, 2025)
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Capacitive Probe Microscopy
Published
Author(s)
Abstract
A scanning capacitance microscope (SCM) combines a differential capacitance measurement with an atomic force microscope (AFM). The AFM controls the position and contact force of a scanning probe tip, and a sensor simultaneously measures the capacitance between that tip and the sample under test. The capacitance sensor can detect very small changes in capacitance. The sensor is electrically connected to an AFM cantilevered tip that has been coated with metal to make it electrically conductive. As the SCM/AFM tip is scanned across the sample surface, simultaneous images of topography and differential capacitance are obtained.Citation
Encyclopedia of Imaging Science and Technology
Pub Type
Encyclopedias
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Created January 14, 2002, Updated October 16, 2008