Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Search Patents by R Joseph Kline

Patents listed here reflect only technologies patented from FY 2018-present. To view all of NIST's patented technologies, visit the NIST pages on the Federal Laboratory Consortium website.

Displaying 1 - 1 of 1

Determining Tilt Angle In Patterned Arrays Of High Aspect-Ratio Structures By Small-Angle X-Ray Scattering

NIST Inventors

Wen-Li Wu , Daniel Sunday and R Joseph Kline

Provided herein are methods and apparatus for characterizing high aspect ratio (HAR) structures of fabricated or partially fabricated semiconductor devices. The methods involve using small angle X-ray scattering (SAXS) to determine average parameters of an array of HAR structures. In some