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Patents listed here reflect only technologies patented from FY 2018-present. To view all of NIST's patented technologies, visit the NIST pages on the Federal Laboratory Consortium website.
The proposed invention is a method of producing a superconducting multi-layer transition-edge sensor in which the first layer of the multi-layer is deposited and patterned completely with a subtractive process before the subsequent layers deposited and patterned using separate additive processes
Hybrid subtractive-additive production of a superconducting multi-layer transition-edge sensor includes: forming a superconductor layer; forming a patterning photoresist on the superconductor layer; forming a sensor pattern in the patterning photoresist; subtractively forming, from the
A microbolometer structure including carbon nanotubes, a substrate (silicon, alumina, etc.) with an array of micromachined wells/holes/pockets, a weak thermal link (membrane or legs) at the base of each well/hole/pocket, a protection layer bonded to substrate over the wells for subsequent back side
Kevin L. Silverman
,
Carl D. Reintsema
,
Galen O'Neil
,
Luis Miaja Avila
,
Daniel Swetz
,
W.Bertrand (Randy) Doriese
,
Dan Schmidt
,
Bradley Alpert
,
Joseph Fowler
,
Joel Ullom
and
Ralph Jimenez
This invention includes: an x-ray plasma source that produces primary x-rays; an x-ray optic that transmits and focuses the primary x-ray onto a sample jet from which fluorescence x-ray are emitted; and a microcalorimeter array detector that measures the energy of the incoming fluorescence x-rays