Schenck, P.
and Kaiser, D.
(2003),
Blazing a Trail, Chemistry in Britain
(Accessed May 10, 2025)
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Blazing a Trail
Published
Author(s)
,
Abstract
In this paper we discuss the application of pulsed laser deposition (PLD) to combinatorial materials research on inorganic thin films. The modifications to an existing PLD apparatus converting it to a dual beam dual target PLD system for the production of compositionally graded library films are detailed. The use of automated spectroscopic reflectometry as a high throughput characterization tool is also discussed. The paper also explains why PLD is a good prototyping tool for thin films and what principles are behind spectroscopic reflectometry.Citation
Chemistry in Britain
Volume
39
Issue
No. 5
Pub Type
Journals
Keywords
combinatorial, high throughput, pulsed laser deposition, reflectometry, spectroscopic, thin films
Citation
Issues
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Created May 1, 2003, Updated February 19, 2017