Tarrio, C.
, Watts, R.
, Lucatorto, T.
, Slaughter, J.
and Falco, C.
(1998),
Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,, Applied Optics
(Accessed May 14, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,
Published
Author(s)
, , , J M. Slaughter, C M. Falco
Citation
Applied Optics
Volume
37
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created January 1, 1998, Updated February 17, 2017