Pomeroy, J.
, Ratliff, L.
, Gillaspy, J.
and Bajt, S.
(2006),
Potential Energy Sputtering of EUVL Materials, SPIE
(Accessed May 14, 2025)
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Potential Energy Sputtering of EUVL Materials
Published
Author(s)
, , , Sasa Bajt
Citation
SPIE
Volume
PM149
Pub Type
Journals
Keywords
electron beam ion trap (EBIT), euv light sources, euv lithography, highly charged ions, scanning tunneling microscopy, surface analysis, xenon
Citation
Issues
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Created February 23, 2006, Updated February 17, 2017