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Search Publications by: Robert E Vest (Fed)

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Displaying 26 - 50 of 145

SURF III: A flexible Synchrotron Radiation Source for Radiometry and Research

September 1, 2011
Author(s)
Uwe Arp, Charles W. Clark, Lu Deng, Nadir S. Faradzhev, Alex P. Farrell, Mitchell L. Furst, Steven E. Grantham, Edward W. Hagley, Shannon B. Hill, Thomas B. Lucatorto, Ping-Shine Shaw, Charles S. Tarrio, Robert E. Vest
The calculability of synchrotron radiation (SR) makes electron storage rings wonderful light sources for radiometry. The broadband nature of SR allows coverage of the whole spectral region from the x-ray to the far-infrared. Compact low-energy storage

Far-ultraviolet signatures of the 3He(n,tp) reaction in noble gas mixtures

December 8, 2010
Author(s)
Patrick Hughes, Alan K. Thompson, Michael Coplan, Robert E. Vest, Charles W. Clark
Previous work showed that the 3He(n,tp) reaction in a cell of 3He at atmospheric pressure generated tens of far-ultraviolet photons per reacted neutron. Here we report amplification of that signal by factors of 1000 and more when noble gases are added to

Tracking down sources of carbon contamination in EUVL exposure tools

August 3, 2009
Author(s)
Charles S. Tarrio, Robert E. Vest, Thomas B. Lucatorto, R. Caudillo
Optics in EUVL exposure tools are known to suffer reflectivity degradation, mostly from the buildup of carbon. The sources of this carbon have been difficult to identify. Vacuum cleanliness is normally monitored with a residual gas analyzer, but this has

At-Wavelength Metrology for EUV Lithography at NIST

July 14, 2009
Author(s)
Charles S. Tarrio, Steven E. Grantham, Robert E. Vest, Thomas B. Lucatorto
The National Institute of Standards and Technology (NIST) is active in many areas of metrology impacting extreme ultraviolet lithography. We will describe our activities in the areas of reflectometry, pulsed radiometry, and long-term multiplayer mirror

Measuring Pulse Energy With Solid-State Photodiodes

April 10, 2009
Author(s)
Robert E. Vest, Shannon B. Hill, Steven E. Grantham
With the advent of extreme ultraviolet lithography (EUVL) the measurement of the energy contained in pulses of short-wavelength radiation is becoming increasingly important. Even low average power sources can deliver pulses of radiation with high peak

EUVL dosimetry at NIST

March 13, 2009
Author(s)
Charles S. Tarrio, Steven E. Grantham, Marc J. Cangemi, Robert E. Vest, Thomas B. Lucatorto, Noreen Harned
As part of its role in providing radiometric standards in support of industry, NIST has been active in advancing extreme ultraviolet dosimetry on various fronts. Recently, we undertook a major effort in accurately measuring the sensitivity of three extreme

Quantitative Measurement of Outgas Products From EUV Photoresists

March 14, 2008
Author(s)
Charles S. Tarrio, Bruce A. Benner Jr, Robert E. Vest, Steven E. Grantham, Shannon B. Hill, Thomas B. Lucatorto, Jay H. Hendricks, Patrick J. Abbott, Greg Denbeaux, Alin Antohe, Chimaobi Mbanaso, Kevin Orbek
The photon-stimulated emission of organic molecules from the photoresist during exposure is a serious problem for extreme- ultraviolet lithography (EUVL) because the adsorption of the outgassing products on the EUV optics can lead to carbonization and

SDO EVE CCD and Thin Foil Filter Characterization and Selection

September 13, 2007
Author(s)
Matthew Triplett, David Croster, Thomas N. Woods, Francis Eparvier, Phillip Chamberlin, Gregory D. Berthiaume, David Weitz, Robert E. Vest
The NASA Solar Dynamics Observatory (SDO), scheduled for launch in 2008, incorporates a suite of instruments including the EUV Variability Experiment (EVE). The EVE instrument package contains grating spectrographs used to measure the solar extreme

SDO EVE ESP Radiometric Calibration and Results

September 13, 2007
Author(s)
Leonid Didkovsky, D L. Judge, Seth Wieman, T N. Woods, Phillip Chamberlin, Andrew Jones, Francis Eparvier, Matthew Triplett, Donald Woodraska, D R. McMullin, Mitchell L. Furst, Robert E. Vest
The Solar Dynamics Observatory (SDO) Extreme ultraviolet Solar Photometer (ESP), as a part of the Extreme ultraviolet Variability Experiment (EVE) suite of instruments, was calibrated at the National Institute of Standards and Technology (NIST) on the