February 19, 2014
Author(s)
Albert Davydov, Ratan K. Debnath, B. Wen, Dipak Paramanik, Abhishek Motayed, M. King
Large-area gallim nitride (GaN) nanopillars (NPs) arrays were fabricated by plasma etching of lithographically patterned GaN thin-film grown on Si substrate. Deep-UV lithography, inductively-coupled plasma etching, and follow-on chemical treatments were