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Search Publications by: Aaron Chew (Fed)

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Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

April 24, 2025
Author(s)
Bryan Barnes, Aaron Chew, Nicholas Jenkins, Yunzhe Shao, Martin Sohn, Regis Kline, Daniel Sunday, Purnima Balakrishnan, Thomas Germer, Steven Grantham, Clay Klein, Stephanie Moffitt, Eric Shirley, Henry Kapteyn, MARGARET MURNANE
Background: The industry is developing extreme-ultraviolet wavelength (EUV) techniques to measure critical dimensions (CDs) in logic fabrication. As nascent approaches are unveiled, evaluations against reference metrologies are essential to motivate