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Search Publications by: Thomas B. Lucatorto (Assoc)

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Displaying 101 - 125 of 228

Extreme Ultraviolet Metrology at SURF III

January 1, 2001
Author(s)
Charles S. Tarrio, Robert E. Vest, S Grantham, Thomas B. Lucatorto
The last two decades have seen the development normal-incidence multiplayer mirrors and semiconductor photodiodes for extreme ultraviolet (EUV) radiation. Applications such as in astrophysics, lithography, and plasma physics, require precise calibrations

Doppler-Free Two-Photon Spectroscopy in the VUV: The Helium 1 1 S - 2 1 S Transition

September 1, 2000
Author(s)
S D. Bergeson, K G. Baldwin, Thomas B. Lucatorto, T J. McIlrath, C H. Cheng, E E. Eyler
We describe techniques for laser spectroscopy in the vacuum ultraviolet (VUV) spectral region that combine high spectral resolution with high absolute accuracy. A nearly transform-limited nanosecond laser source at 120 nm is constructed using difference

Selected Programs at the New SURF III Electron Storage Ring

June 1, 2000
Author(s)
Mitchell L. Furst, Uwe Arp, G P. Cauchon, A D. Hamilton, L R. Hughey, Thomas B. Lucatorto, Charles S. Tarrio
The conversion of the electron storage ring at NIST (the National Institute of Standards and Technology) to SURF III (the Synchrotron Ultraviolet Radiation Facility) has resulted in a significant improvement to the azimuthal uniformity of magnetic field as

Tomography of Integrated Circuit Interconnect With an Electromigration Void

May 1, 2000
Author(s)
Zachary H. Levine, A R. Kalukin, M Kuhn, S P. Frigo, I McNulty, C C. Retsch, Y Wang, Uwe Arp, Thomas B. Lucatorto, Bruce D. Ravel, Charles S. Tarrio
An integrated circuit interconnect was subject to accelerated-life conditions to induce an electromigration void. The silicon substrate was removed, leaving only the interconnect encased test structure encased in silica. We imaged the sample with 1750 eV

Characterization of Materials Using an Ultraviolet Radiometric Beamline at SURF III

January 1, 2000
Author(s)
Ping-Shine Shaw, R Gupta, Thomas A. Germer, Uwe Arp, Thomas B. Lucatorto, Keith R. Lykke
The completion of the upgrade of the synchrotron facilities at the National Institute of Standards and Technology (NIST) has yielded a better-characterization broadband source of ultraviolet (UV) radiation at the Synchrotron Ultraviolet Radiation Facility