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Search Publications by: James K. Olthoff (Assoc)

Displaying 101 - 125 of 272

Electron Interactions With Plasma Processing Gases: CF 4 , CHF 3 , C 2 F 6 , and C 3 F 8

January 1, 1998

Author(s)

Loucas G. Christophorou, James K. Olthoff

A review of our efforts to evaluate and assess electron interaction data for the plasma processing community is presented. Specifically we present in this paper our recommended electron-interaction cross sections for CF 4, CHF 3, C 2F 6, and C 3F 8.

Mass Spectrometric Measurement of Molecular Dissociation in Inductively-coupled Plasmas

January 1, 1998

Author(s)

Yicheng Wang, Richard J. Van Brunt, James K. Olthoff

Gases for Electrical Insulation and Arc Interruption: Possible Present and Future Alternatives to Pure SF 6

November 1, 1997

Author(s)

Loucas G. Christophorou, James K. Olthoff, David S. Green

The electric power industry's preferred gaseous dielectric (besides air), sulfur hexafluoride (SF6) has been shown to be a greenhouse gas. In this report we provide information that is useful in identifying possible replacement gases, in the event that