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Search Publications by: Theodore V. Vorburger (Assoc)

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Displaying 101 - 125 of 417

Computational Models of the Nano Probe Tip for Static Behaviors

June 1, 2007
Author(s)
Shaw C. Feng, Theodore V. Vorburger, Che B. Joung, Li Ma
As integrated circuits become smaller and faster, the measurement of line width must have less uncertainty and more versatility. The common requirement for uncertainty is less than 10 nanometers. The industrial need for versatility is three dimensional

Surface Topography Analysis for a Feasibility Assessment of a National Ballistics Imaging Database

May 1, 2007
Author(s)
Theodore V. Vorburger, James H. Yen, B Bachrach, Thomas Brian Renegar, Li Ma, Hyug-Gyo Rhee, Xiaoyu Alan Zheng, Jun-Feng Song, Charles D. Foreman
This document reports on a study to determine the feasibility and utility of a national ballistics database of casing and bullet images. The purpose of such a proposed database would be to provide a reference collection of ballistic images against which

Application of Carbon Nanotube Probes in a Critical Dimension Atomic Force Microscope

March 1, 2007
Author(s)
B C. Park, J Choi, S J. Ahn, D H. Kim, L Joon, Ronald G. Dixson, Ndubuisi George Orji, Joseph Fu, Theodore V. Vorburger
The ever decreasing size of semiconductor features demands the advancement of critical dimension atomic force microscope (CD-AFM) technology, for which the fabrication and use of more ideal probes like carbon nanotubes (CNT) is of considerable interest

Computational Models of the Nana Probe Tip for Static Behaviors (Abstract Only)

February 1, 2007
Author(s)
Shaw C. Feng, Theodore V. Vorburger, Che B. Joung, Joseph Fu, Ronald G. Dixson, Li Ma
As integrated circuits become smaller and faster, the measurement of line width must have less uncertainty and more versatility. The common requirement for uncertainty is less than 10 nanometers. The industrial need for versatility is three dimensional

3D Image Correction of Tilted Sample Through Coordinate Transformation

January 1, 2007
Author(s)
Wei Chu, Joseph Fu, Ronald G. Dixson, Theodore V. Vorburger
In scanned probe measurements of micrometer- or nanometer-scale lines, it is nearly impossible to maintain the sample in a perfectly level position, and even a small amount of tilt angle can contribute to the accuracy of the result of measurand such as

Comparison of Optical and Stylus Methods for Measurement of Rough Surfaces

January 1, 2007
Author(s)
Theodore V. Vorburger, H G. Rhee, Thomas B. Renegar, Jun-Feng Song, Xiaoyu A. Zheng
Abstract Optical methods are increasingly used for measurement of surface texture, particularly for areal measurements where the optical methods are generally faster. A new Working Group under Technical Committee (TC) 213 in the International Organization

Linewidth Measurement Based on Automatically Matched and Stitched Images

January 1, 2007
Author(s)
Wei Chu, Joseph Fu, Ronald G. Dixson, Theodore V. Vorburger
The emergence of ultra-sharp carbon nanotube (CNT) tips provides a new approach to minimize the distortion of the measured linewidth profile caused by interaction with the fmite probe tip size. However, the inevitable tilt angle resulting from attaching

NIST Standard Bullets and Casings Project

January 1, 2007
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Susan M. Ballou, Thomas Brian Renegar, Li Ma, Eric P. Whitenton, David R. Kelley, Robert A. Clary, A Zheng, M Ols
The National INstitute of Standards and Technology (NIST) standard bullets and casings project will provide support to firearm examiners and to the National Integrated Ballistics Information Network (NIBIN) in the United States. The standard bullet is

Surface Metrology Algorithm Testing System

January 1, 2007
Author(s)
Son H. Bui, Theodore V. Vorburger
This paper presents the development of a Web-based surface metrology algorithm testing system. The system includes surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a

Correlation of Topography Measurements of NIST SRM 2460 Standard Bullets by Four Techniques

January 1, 2006
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Thomas Brian Renegar, Hyug-Gyo Rhee, A Zheng, L Ma, John M. Libert, Susan M. Ballou, B Bachrach, K Bogart
Three optical instruments including an interferometric microscope, a Nipkow disk confocal microscope and a laser scanning confocal microscope are used for the measurements of bullet profile signatures of a NIST (National Institute of Standards and

Correlation of Topography Measurements of NIST SRM 2460 Standard Bullets by Four Techniques

January 1, 2006
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Thomas Brian Renegar, Xiaoyu Alan Zheng, Hyug-Gyo Rhee, John M. Libert, Li Ma, K Bogart, Susan M. Ballou, B Bachrach
Three optical instruments including an interferometric microscope, a Nipkow disk confocal microscope and a laser scanning confocal microscope are used for the measurements of bullet profile signatures of a National Institute of Standards and Technology