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Search Publications by: Theodore V. Vorburger (Assoc)

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Displaying 126 - 150 of 417

International Comparison of Surface Roughness and Step Height (Depth) Standards, SIM 4.8

January 1, 2006
Author(s)
K Doytchinov, F Kornblit, C C. Castellanos, J C. Oliveira, Thomas Brian Renegar, Theodore V. Vorburger
Calibration services of 5 countries from the SIM region are compared through measurements of surface roughness and step height standards. A surface roughness standard with a nominal Ra value of 0.2 mm, a surface roughness standard with a nominal Ra value

Nano- and Atomic-Scale Length Metrology

January 1, 2006
Author(s)
Theodore V. Vorburger, Ronald G. Dixson, Joseph Fu, Ndubuisi George Orji, Shaw C. Feng, Michael W. Cresswell, Richard A. Allen, William F. Guthrie, Wei Chu
We discuss nano-scale length metrology of linewidth, step height, and line edge roughness (LER). These properties are of growing importance to the function and specification of semiconductor devices as the dimensions of semiconductor devices shrink to the

Topography Measurements and Applications

January 1, 2006
Author(s)
Jun-Feng Song, Theodore V. Vorburger
Based on auto- and cross-correlation functions (ACF and CCF), a new surface parameter called profile (or topography) difference, Ds, has been developed for quantifying differences between 2D profiles or between 3D topographies with a single number. When Ds

The Study of Silicon Stepped Surfaces as Atomic Force Microscope Calib Standards With a Calibrated AFM at NIST

September 29, 2005
Author(s)
V W. Tsai, Theodore V. Vorburger, Ronald G. Dixson, Joseph Fu, R Koning, Richard M. Silver, Edwin R. Williams
Due to the limitations of modern manufacturing technology, there is no commercial height artifact at the sub-nanometer scale currently available. The single-atom steps on a cleaned silicon (111) surface with a height of 0.314 nm, derived from the lattice

2D and 3D Surface Texture Comparisons Using Autocorrelation Functions

January 1, 2005
Author(s)
Jun-Feng Song, Li Ma, Eric P. Whitenton, Theodore V. Vorburger
Autocorrelation and cross-correlation functions are proposed for 2D and 3D surface texture comparisons. At the maximum correlation point of the two correlated surface textures, there is a peak shown at the cross-correlation curve. It is proposed to

2D and 3D Surface Texture Comparisons Using Autocorrelation Functions

January 1, 2005
Author(s)
Jun-Feng Song, Li Ma, Eric P. Whitenton, Theodore V. Vorburger
Autocorrelation and cross-correlation functions are proposed for 2D and 3D surface texture comparisons. At the maximum correlaton point of the two correlated surface textrues, there is a peak shown at the cross-correaltion curve. It is proposed to generate

Internet-Based Surface Metrology Algorithm Testing System

January 1, 2005
Author(s)
Mark C. Malburg, Jayaraman Raja, Son H. Bui, Thomas Brian Renegar, Bui Son Brian, Theodore V. Vorburger
Software is an integral part of most measurement systems and it is particularly important in roughness measurement and analysis. Evaluation and assessment of measured roughness profiles must be performed in accordance with standards. Different types of

Line Edge Roughness Metrology Using Atomic Force Microscopes

January 1, 2005
Author(s)
Ndubuisi G. Orji, Theodore V. Vorburger, Joseph Fu, Ronald G. Dixson, C Nguyen, Jayaraman Raja
Line edge roughness measurements using two types of atomic force microscopes and two types of tips are compared. Measurements were made on specially prepared samples with inscribed edge roughness of different amplitudes and wavelengths. The spatial

Linewidth Measurement from a Stitched AFM Image

January 1, 2005
Author(s)
Joseph Fu, Ronald G. Dixson, Ndubuisi G. Orji, Theodore V. Vorburger, C Nguyen
Image stitching is a technique that combines two or more images to form one composite image, which provides a field of view that the originals cannot. It has been widely used in photography, medical imaging, and computer vision and graphics. For such

Internet-Based Surface Metrology Algorithm Testing System

December 1, 2004
Author(s)
Son H. Bui, Thomas B. Renegar, Theodore V. Vorburger, Jayaraman Raja, Mark C. Malburg
This paper presents the development of an Internet-based surface metrology algorithm testing system. The system includes peer-reviewed surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The